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低温泵在超高真空炉中的应用实例

十多年前开始在相关工艺设备中应用、无油系统来获得超高真空,效果满意。这次尝试将低温泵快速、洁净和可靠的独特优势应用到真空炉中。将低温泵并入真空系统中,达到清洁的超高真空环境。本文以实例介绍了低温泵在超高真空炉中的应用; 重点介绍了低温泵真空系统的设计思路,真空系统的主要配置和注意事项,低温泵的选型计算,并用图示方法详细介绍了低温泵系统的安装、使用和维护等环节。对同类真空炉的研发和低温泵的应用都有参考价值。通过严格把关各研发环节,按照超高真空规范进行清洗,除气和烘烤,最后真空炉的极限压力达到了2 × 10-7Pa,将常规的真空炉极限压力延伸了近一个数量级。近年来无油真空泵在半导体行业为代表的领域被引进并广泛应用。从而低温泵+ 干泵为代表的无油超高真空获得系统在半导体电子技术、光学镀膜系统和航空航天领域得到了广泛推广。

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真空系统的设计

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低温泵在超高真空炉中的应用实例

TU1 ZHENKONGXITONGJIEGOUTU

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低温泵在超高真空炉中的应用实例

TU2 ZHENKONGXITONGYUANLITU

  当分子泵机组和压缩机同时启动,大约120 min后低温泵二级冷头从室温降到15 K 以下(可以开启低温泵阀门),此时真空炉系统的可以达到10-5Pa,这样低温泵可以直接从高真空开始抽气。

BIAO1 ZHENKONGXITONGZHUYAOPEIZHI

低温泵在超高真空炉中的应用实例

结论

  本套设备是一套典型的中型真空炉,应用于超高真空条件下的扩散焊工艺,热容量和表面积都大于同规格的热处理炉,自动化程度较高,配置低温泵更能发挥其显著优势。真空炉最终测试的极限压力为2 × 10-7 Pa( 冷态、空炉) ,压升率为0.002 Pa /h。指标优于常用高真空炉。目前国内低温泵的应用大多还依赖进口,和相同口径的其它泵相比,价格也比较昂贵。但在高洁净工艺环境、纯无油真空和超高真空领域仍然有很大的优势,并且从使用成本和寿命上比较,低温泵并不比其它泵差。国内低温泵的研发目前还待成熟,尤其是压缩机技术,期待国内洁净真空泵行业的兴起。


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